Poly [N-(p-hydroxyphenyl)maleimide](PHPMI) was reacted with cinnamoyl chloride to give a photosensitive polymer CPHPMI having cinnamoyl groups in the side chains. Photosensitive CPHPMI films were prepared by mixing CPHPMI with benzophenone or 1,2-benzoanthraquinone as a photosensitizer. Photosensitive properties of CPHPMI were Investigated by measuring the yields of residual film. The residual film thickness of GPHPMI resist was further increased with increasing photosensitizer content from 1wt% to 5wt%. Negative tone images of CPHPMI resist films were obtained by UV exposure and development.

Poly [N-(p-hydroxyphenyl)maleimide](PHPMI)를 합성하고 clnnamoyl chloride와 반응시켜 감광성 cinnamoyl 기를 측쇄에 함유한 GPHPMI를 합성하였다 광중감제인 benzophenone과 1,2-benzoanthraquinone을 농도별로 CPHPMI와 혼합하여 감광액을 제조하였다. 자외선 조사에 의한 잔막실험 결과 광중감제 농도가 1 wt% 또는 5 wt%로 증가함에 따라 잔막수율이 더욱 증가하였고 감광도도 증가하는 경향을 보였다. 또한 CPHPMI의 자외선 조사에 의한 화상형성과 해상력을 조사하였다.

Keywords: polymaleimide; photosensitive polymer; photosensitizer; negative image; cinnamoyl groups