Article

E-beam Resist Characteristics of the Plasma Copolymerized MMA-Styrene Thin Films
Park J, Lee D
플라즈마 공중합 MMA-Styrene 박막의 E-beam 레지스트 특성
박종관, 이덕출

References

1. Curtis BJ, Brunner HR, Ebnoether M, J. Electrochem. Soc., 130, 2242 (1983)
2. Morita S, Tamano J, Hattori S, Ieda M, J. Appl. Phys., 51, 3983 (1980)
3. Kim JB, Polym. Sci. Technol., 1(6), 370 (1990)
4. Lee DCProc. of the Spring Symp. of KIEE, pp. 76 ~ 79 (1993)
5. Montasser K, Hattori S, Thin Solid Films, 117, 311 (1984)
6. Gokan H, J. Electrochem. Soc., 130(1), 143 (1983)
7. Kim YM, J. Anal. Sci. Technol., 5(2) (1992)
8. Morita S, Sawa G, Ieda M, J. Macromol. Sci., A10(3), 501 (1976)
9. Brown WL, Venkatesan T, Wagner A, Solid State Technol., 24(8), 60 (1981)
10. Hori H, Yoneda T, Morita S, Hattori S, J. Vac. Sci. Technol. B, 4(2), 500 (1986)

Polymer(Korea) 폴리머
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