Article

Inhibition of Surface Insolubilization in Chemically Amplified Positive Type Deep-UV Resists
Yang SK, Park CE, Kang JH, Ahn KD
화학증폭을 이용한 원자외선용 포지티브 레지스트의 표면 불용성 억제
양승관, 박찬언, 강종희, 안광덕

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Polymer(Korea) 폴리머
Frequency : Bimonthly(odd)
ISSN 0379-153X(Print)
ISSN 2234-8077(Online)
Abbr. Polym. Korea
2023 Impact Factor : 0.4
Indexed in SCIE