Modification of PMMA for a Deep UV Photoresist ; 1. Photodegradation of P(MMA-co-BOXM-co-TBMA)
Chae KH, Whang ID, Ahn KD, Park SH
원자외선 포토레지스트로서 PMMA의 개질에 관한 연구; 1. p(MMA-co-BOXM-co-TBMA)의 광분해 반응
채규호, 황인동, 안광덕, 박서호
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