We report a study to develop 'highly fluorinated polymer-inorganic hybrid materials' and their dispersions in materials-and-environment-friendly fluorous solvents. Because of their limited interactions with conventional organic materials, the fluorous solvents are regarded to be advantageous processing media in constructing multi-layered organic electronic devices by solution processing. With the help of an efficient coupling reaction between amine-functionalized BaTiO3 (BTO) and poly(1H,1H,2H,2H-perfluorodecyl methacrylate) (PFDMA) chains modified with N-hydroxysuccinimide (NHS) ester group, it was possible to recover the highly fluorinated organic/inorganic nanocomposite, BTOPFDMA. The dispersion of BTO-PFDMA with highly fluorinated negative-tone photoresist polymer, P(FDMA-r-GMA), in a hydrofluoroether solvent, HFE-7500 or PF-7600, showed sufficient dispersion stability and spin-casting properties. Thin films of polymer-inorganic composite materials were fabricated by spin-casting method, and patterns as small as 10 μm could be built by UV exposure and rinse with a fluorous solvent.

재료친화적, 환경친화적인 고불소계 용제에 분산되어 용액 공정을 통해 적층 구조의 유기소자 제작을 가능케하는 '고불소화 고분자-나노 복합재료 분산액'의 개발 노력을 보고한다. 고불소계 용제에 무기 나노입자를 분산시키고자 N-hydroxysuccinimide(NHS) ester를 이용하는 커플링 반응을 적용하여 높은 유전상수를 지니는 BaTiO3(BTO) 표면에 고불소화 고분자인 poly(1H,1H,2H,2H-perfluorodecyl methacrylate)(PFDMA)를 리간드로 도입하였다. 회수된 '고불소화 유/무기 나노 복합재료(BTO-PFDMA)'는 고불소계 용제에 대한 분산 특성을 나타내었으며, 고불소화 고 분자 감광재료인 P(FDMA-r-GMA)와 고분자-무기입자 복합재료 분산액을 형성하여 자외선 조사를 통해 10 μm급 패턴 형성이 가능함을 보여주었다.

Keywords: organic-inorganic nanocomposites; photopatterning; highly fluorinated polymer ligand; fluorous solvents; NHS-ester coupling reaction